Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181271 | Estimating in-die overlay with tool induced shift correction | Min-Yeong Moon, Dimitry Sanko | 2024-12-31 |
| 12148639 | Correcting target locations for temperature in semiconductor applications | Min-Yeong Moon, Phalguna Kumar Rachinayani, Jean-Christophe Perrin | 2024-11-19 |
| 11880142 | Self-calibrating overlay metrology | Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2024-01-23 |