Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899375 | Massive overlay metrology sampling with multiple measurement columns | Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon, Gilad Laredo +1 more | 2024-02-13 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Dimitry Sanko, Liran Yerushalmi +2 more | 2024-01-23 |