Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055859 | Overlay mark design for electron beam overlay | Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-08-06 |
| 11862524 | Overlay mark design for electron beam overlay | Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-01-02 |