Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085385 | Design-assisted large field of view metrology | Frank Laske | 2024-09-10 |
| 12055859 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-08-06 |
| 11894214 | Detection and correction of system responses in real-time | Henning Stoschus, Christopher T. Sears | 2024-02-06 |
| 11862524 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-01-02 |