Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111580 | Optical metrology utilizing short-wave infrared wavelengths | Amnon Manassen, Isaac Salib, Raviv Yohanan, Diana Shaphirov, Vladimir Levinski +7 more | 2024-10-08 |
| 12105414 | Targets for diffraction-based overlay error metrology | Itay Gdor, Yuval Lubashevsky, Daria Negri, Vladimir Levinski | 2024-10-01 |
| 12055859 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Ulrich Pohlmann +4 more | 2024-08-06 |
| 11862524 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Ulrich Pohlmann +4 more | 2024-01-02 |