Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105414 | Targets for diffraction-based overlay error metrology | Yuval Lubashevsky, Daria Negri, Eitan Hajaj, Vladimir Levinski | 2024-10-01 |
| 12105431 | Annular apodizer for small target overlay measurement | Yuval Lubashevsky, Alon Alexander Volfman, Daria Negri, Yevgeniy Men, Elad Farchi | 2024-10-01 |