| 12170215 |
Systems and methods for correction of impact of wafer tilt on misregistration measurements |
Vladimir Levinski, Amnon Manassen |
2024-12-17 |
| 12165930 |
Adaptive modeling misregistration measurement system and method |
Amnon Manassen, Vladimir Levinski, Nireekshan K. Reddy |
2024-12-10 |
| 12131959 |
Systems and methods for improved metrology for semiconductor device wafers |
Liran Yerushalmi, Ohad Bachar, Yossi Simon, Amnon Manassen, Nir Ben David +2 more |
2024-10-29 |
| 12105414 |
Targets for diffraction-based overlay error metrology |
Itay Gdor, Yuval Lubashevsky, Eitan Hajaj, Vladimir Levinski |
2024-10-01 |
| 12105431 |
Annular apodizer for small target overlay measurement |
Itay Gdor, Yuval Lubashevsky, Alon Alexander Volfman, Yevgeniy Men, Elad Farchi |
2024-10-01 |
| 12080610 |
Wavelet system and method for ameliorating misregistration and asymmetry of semiconductor devices |
Lilach Saltoun |
2024-09-03 |
| 12032300 |
Imaging overlay with mutually coherent oblique illumination |
Andrew V. Hill, Vladimir Levinski, Amnon Manassen, Yonatan Vaknin |
2024-07-09 |
| 12001148 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Vladimir Levinski +9 more |
2024-06-04 |
| 11879632 |
System and method for generating light |
Carmel Rotschild, Michal Shimanovich, Matej Kurtulik |
2024-01-23 |
| 11880141 |
Method of measuring misregistration in the manufacture of topographic semiconductor device wafers |
Amnon Manassen, Gilad Laredo |
2024-01-23 |