| 12131959 |
Systems and methods for improved metrology for semiconductor device wafers |
Liran Yerushalmi, Daria Negri, Ohad Bachar, Amnon Manassen, Nir Ben David +2 more |
2024-10-29 |
| 12001148 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Daria Negri, Vladimir Levinski +9 more |
2024-06-04 |
| 11933717 |
Sensitive optical metrology in scanning and static modes |
Andrew V. Hill, Amnon Manassen, Yoram Uziel, Gilad Laredo |
2024-03-19 |
| 11921825 |
System and method for determining target feature focus in image-based overlay metrology |
Etay Lavert, Amnon Manassen, Dimitry Sanko, Avner Safrani |
2024-03-05 |
| 11899375 |
Massive overlay metrology sampling with multiple measurement columns |
Jonathan M. Madsen, Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Gilad Laredo +1 more |
2024-02-13 |