Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Erika HANSEN +3 more | 2024-11-12 |
| 12125698 | Integrated epitaxy and preclean system | Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2024-10-22 |
| 12110585 | Process chamber and exhaust liner system therefor | Naman Apurva, Mahesh Ramakrishna, Sriharish Srinivasan, Prashant Agarwal | 2024-10-08 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more | 2024-05-28 |
| 11990321 | Fast response pedestal assembly for selective preclean | Chaitanya A. PRASAD | 2024-05-21 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2024-04-16 |
| 11927482 | Methods for calibrating an optical emission spectrometer | Kin Pong Lo, Malcolm J. Bevan, Theresa Kramer Guarini, Wei Liu, Bernard L. Hwang | 2024-03-12 |