Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1034491 | Edge ring | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Malcolm J. Bevan +2 more | 2024-07-09 |
| 12009178 | Ceramic coated quartz lid for processing chamber | — | 2024-06-11 |
| 11927482 | Methods for calibrating an optical emission spectrometer | Kin Pong Lo, Lara Hawrylchak, Malcolm J. Bevan, Theresa Kramer Guarini, Wei Liu | 2024-03-12 |