Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068134 | Digital control of plasma processing | — | 2024-08-20 |
| D1034491 | Edge ring | Kin Pong Lo, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2024-07-09 |
| 12027426 | Image-based digital control of plasma processing | — | 2024-07-02 |