Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12125698 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Kin Pong Lo | 2024-10-22 |