Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |
| 12099897 | Image processing for scanning devices based on laser aimer position | Minyi Wang, Jian Xing, Liu HONGYAN, Lidong Gu, Yu HU | 2024-09-24 |
| 12094748 | Bipolar esc with balanced RF impedance | Edward P. Hammond, IV, Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno, Wenhao Zhang | 2024-09-17 |
| 12080584 | Real time bias detection and correction for electrostatic chuck | Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno | 2024-09-03 |
| 12057339 | Bipolar electrostatic chuck to limit DC discharge | Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Zheng John Ye, Paul Brillhart | 2024-08-06 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji, Mayur Govind Kulkarni +6 more | 2024-07-16 |
| 12000048 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2024-06-04 |
| 11981998 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng | 2024-05-14 |
| 11927491 | Self-calibration detection device and temperature demodulation method oriented to fiber Raman temperature sensing system | Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Baoqiang Yan, Yang Xu +4 more | 2024-03-12 |
| 11901209 | High temperature bipolar electrostatic chuck | Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez | 2024-02-13 |