Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Jian Li, Shinnosuke Kawaguchi, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Jian Li, Shinnosuke Kawaguchi, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |