Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080516 | High density plasma enhanced process chamber | Jianhua Zhou, ShouQian Shao, Suhail Anwar | 2024-09-03 |
| 12057339 | Bipolar electrostatic chuck to limit DC discharge | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart | 2024-08-06 |
| 12038013 | Motor drive shaft spring clutch in electrical submersible pump | Randal Perisho | 2024-07-16 |
| 11956883 | Methods and apparatus for controlling RF parameters at multiple frequencies | Daemian Raj Benjamin Raj, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Ndanka O. Mukuti, Dmitry A. Dzilno +1 more | 2024-04-09 |
| 11935724 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2024-03-19 |
| 11901209 | High temperature bipolar electrostatic chuck | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez | 2024-02-13 |