Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080516 | High density plasma enhanced process chamber | Zheng John Ye, Jianhua Zhou, Suhail Anwar | 2024-09-03 |
| 11967516 | Substrate support for chucking of mask for deposition processes | Jrjyan Jerry CHEN, Sanjay Yadav, Tae Kyung Won, Jun Li, Surendra Kanimihally Setty | 2024-04-23 |
| 11929236 | Methods of tuning to improve plasma stability | Jianhua Zhou, Tae Kyung Won | 2024-03-12 |