Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12076763 | Selective in-situ cleaning of high-k films from processing chamber using reactive gas precursor | Yujia Zhai, Lai ZHAO, Xiangxin Rui, Dong-Kil Yim, Soo Young Choi | 2024-09-03 |
| 11967516 | Substrate support for chucking of mask for deposition processes | Jrjyan Jerry CHEN, Sanjay Yadav, Jun Li, ShouQian Shao, Surendra Kanimihally Setty | 2024-04-23 |
| 11929236 | Methods of tuning to improve plasma stability | ShouQian Shao, Jianhua Zhou | 2024-03-12 |