Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080516 | High density plasma enhanced process chamber | Zheng John Ye, Jianhua Zhou, ShouQian Shao | 2024-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080516 | High density plasma enhanced process chamber | Zheng John Ye, Jianhua Zhou, ShouQian Shao | 2024-09-03 |