Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159785 | Dynamic multi zone flow control for a processing system | Gregory Eugene CHICHKANOFF, Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Abhigyan Keshri +1 more | 2024-12-03 |
| 12110590 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez +5 more | 2024-10-08 |
| 12094689 | Switchable delivery for semiconductor processing system | Sai Susmita Addepalli, Yue Chen, Abhigyan Keshri, Qiang Ma, Zhijun Jiang +2 more | 2024-09-17 |
| 11956883 | Methods and apparatus for controlling RF parameters at multiple frequencies | Zheng John Ye, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Ndanka O. Mukuti, Dmitry A. Dzilno +1 more | 2024-04-09 |
| 11946686 | Thermally stable flow meters for precision fluid delivery | Shailendra Srivastava, Syed A. Alam, Nikhil Sudhindrarao Jorapur, Juan Carlos Rocha-Alvarez | 2024-04-02 |