Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185433 | High-temperature substrate support assembly with failure protection | Suresh Kumar Gupta, Martin Perez-Guzman, Ashish Goel | 2024-12-31 |
| 12148645 | Calibration jig and calibration method | Andrew Myles, Peter Muraoka, Phillip Criminale | 2024-11-19 |
| 12094752 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2024-09-17 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 11935773 | Calibration jig and calibration method | Andrew Myles, Peter Muraoka, Phillip Criminale | 2024-03-19 |