Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12166366 | Substrate enclosure system with assembly for charging a validation wafer | Zhiqiang Guo, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes | 2024-12-10 |
| 12148645 | Calibration jig and calibration method | Andrew Myles, Denis M. Koosau, Peter Muraoka | 2024-11-19 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 11935773 | Calibration jig and calibration method | Andrew Myles, Denis M. Koosau, Peter Muraoka | 2024-03-19 |
| 11929241 | Temperature measurement for substrate carrier using a heater element array | Zhiqiang Guo | 2024-03-12 |
| 11924972 | Diagnostic disc with a high vacuum and temperature tolerant power source | Zhiqiang Guo, Andrew Myles, Martin Perez-Guzman | 2024-03-05 |
| 11913777 | Detector for process kit ring wear | Yogananda Sarode Vishwanath | 2024-02-27 |
| 11870252 | Consolidated filter arrangement for devices in an RF environment | Steve Babayan, Scott Edmonson, Phillip R. Sommer, Dan Marohl, Chris Blank | 2024-01-09 |