Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Shen Peng, Tamarak Pandhumsoporn, Anthony Nguyen | 2024-09-10 | $144,237,000 |
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer | 2024-06-11 | $84,570,000 |
| 11870252 | Consolidated filter arrangement for devices in an RF environment | Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank | 2024-01-09 | $49,156,000 |