Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2024-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2024-06-11 |