Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Shen Peng, Tamarak Pandhumsoporn, Dan Marohl | 2024-09-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Shen Peng, Tamarak Pandhumsoporn, Dan Marohl | 2024-09-10 |