AN

Anthony Nguyen

Lam Research: 1 patents #135 of 408Top 35%
Overall (2024): #540,858 of 561,600Top 100%
1
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
12087557 Substrate processing system including coil with RF powered faraday shield Shen Peng, Tamarak Pandhumsoporn, Dan Marohl 2024-09-10