Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Tamarak Pandhumsoporn, Anthony Nguyen, Dan Marohl | 2024-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Tamarak Pandhumsoporn, Anthony Nguyen, Dan Marohl | 2024-09-10 |