Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837443 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Patrick Breiling, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2023-12-05 |
| 11784027 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Vince Burkhart | 2023-10-10 |
| 11768011 | Apparatus for thermal control of tubing assembly and associated methods | — | 2023-09-26 |
| 11725282 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak | 2023-08-15 |
| 11699610 | Rotational indexer with additional rotational axes | Richard M. Blank | 2023-07-11 |
| 11670535 | Carrier plate for use in plasma processing systems | — | 2023-06-06 |
| 11621150 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Mohamed Sabri | 2023-04-04 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2023-02-28 |
| 11557460 | Radio frequency (RF) signal source supplying RF plasma generator and remote plasma generator | Eller Y. Juco, Huatan Qiu | 2023-01-17 |