Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837441 | Depositing a carbon hardmask by high power pulsed low frequency RF | Matthew Scott Weimer, Pramod Subramonium, Ragesh Puthenkovilakam, Rujun Bai | 2023-12-05 |
| 11823928 | Control of wafer bow in multiple stations | Edward Augustyniak, Sunil Kapoor, Yukinori Sakiyama, George Thomas | 2023-11-21 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2023-02-28 |