Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837441 | Depositing a carbon hardmask by high power pulsed low frequency RF | Matthew Scott Weimer, Ragesh Puthenkovilakam, Rujun Bai, David French | 2023-12-05 |
| 11746420 | PECVD apparatus for in-situ deposition of film stacks | Joseph L. Womack, Dong Niu, Keith Fox | 2023-09-05 |