Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11746420 | PECVD apparatus for in-situ deposition of film stacks | Pramod Subramonium, Joseph L. Womack, Keith Fox | 2023-09-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11746420 | PECVD apparatus for in-situ deposition of film stacks | Pramod Subramonium, Joseph L. Womack, Keith Fox | 2023-09-05 |