Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823928 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823928 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama | 2023-11-21 |