Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Karl Leeser, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2023-02-28 |
| 11557460 | Radio frequency (RF) signal source supplying RF plasma generator and remote plasma generator | Karl Leeser, Huatan Qiu | 2023-01-17 |