Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702748 | Wafer level uniformity control in remote plasma film deposition | Geoffrey Hohn, Rachel E. Batzer, Guangbi Yuan, Zhe Gui | 2023-07-18 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2023-03-21 |
| 11557460 | Radio frequency (RF) signal source supplying RF plasma generator and remote plasma generator | Eller Y. Juco, Karl Leeser | 2023-01-17 |