Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11837443 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Karl Leeser, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2023-12-05 | $84,518,000 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2023-03-21 | $295,628,000 |