Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Guangbi Yuan, Ieva Narkeviciute, Bo Gong | 2023-12-19 |
| 11761079 | Oxidation resistant protective layer in chamber conditioning | Fengyuan Lai, Bo Gong, Guangbi Yuan, Chen-Hua Hsu | 2023-09-19 |
| 11732350 | Films of desired composition and film properties | — | 2023-08-22 |
| 11708634 | Films of desired composition and film properties | — | 2023-07-25 |
| 11680315 | Films of desired composition and film properties | — | 2023-06-20 |
| 11680314 | Films of desired composition and film properties | — | 2023-06-20 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2023-03-21 |