Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Guangbi Yuan, Bo Gong, Bhadri N. Varadarajan | 2023-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Guangbi Yuan, Bo Gong, Bhadri N. Varadarajan | 2023-12-19 |