Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Ieva Narkeviciute, Bo Gong, Bhadri N. Varadarajan | 2023-12-19 |
| 11761079 | Oxidation resistant protective layer in chamber conditioning | Fengyuan Lai, Bo Gong, Chen-Hua Hsu, Bhadri N. Varadarajan | 2023-09-19 |
| 11702748 | Wafer level uniformity control in remote plasma film deposition | Geoffrey Hohn, Huatan Qiu, Rachel E. Batzer, Zhe Gui | 2023-07-18 |