Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702748 | Wafer level uniformity control in remote plasma film deposition | Geoffrey Hohn, Huatan Qiu, Rachel E. Batzer, Guangbi Yuan | 2023-07-18 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2023-03-21 |