Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Guangbi Yuan, Ieva Narkeviciute, Bhadri N. Varadarajan | 2023-12-19 |
| 11761079 | Oxidation resistant protective layer in chamber conditioning | Fengyuan Lai, Guangbi Yuan, Chen-Hua Hsu, Bhadri N. Varadarajan | 2023-09-19 |
| 11657599 | Method for detecting appearance of six sides of chip multi-layer ceramic capacitor based on artificial intelligence | Chaofan Yu, Sheng ZENG, Liping Zhu, Guangjin Ye | 2023-05-23 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Will Schlosser +3 more | 2023-03-21 |