Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725282 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Douglas Keil, Edward Augustyniak, Karl Leeser | 2023-08-15 |
| 11661654 | Substrate processing systems including gas delivery system with reduced dead legs | Antonio Xavier, Frank L. Pasquale, Ryan Blaquiere, Jennifer Leigh Petraglia, Meenakshi Mamunuru | 2023-05-30 |