Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661654 | Substrate processing systems including gas delivery system with reduced dead legs | Ramesh Chandrasekharan, Antonio Xavier, Frank L. Pasquale, Jennifer Leigh Petraglia, Meenakshi Mamunuru | 2023-05-30 |