Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725282 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Edward Augustyniak, Karl Leeser | 2023-08-15 |
| 11621150 | Mechanical suppression of parasitic plasma in substrate processing chamber | Edward Augustyniak, Karl Leeser, Mohamed Sabri | 2023-04-04 |