Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621150 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2023-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621150 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2023-04-04 |