Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833662 | Wafer handling robot with radial gas curtain and/or interior volume control | Charles N. Ditmore | 2023-12-05 |
| 11742229 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Peter Thaulad, Paul Konkola | 2023-08-29 |
| 11699610 | Rotational indexer with additional rotational axes | Karl Leeser | 2023-07-11 |
| 11581214 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Brett M. Herzig, Benjamin W. Mooring | 2023-02-14 |