Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Sunil Kapoor, Aaron Bingham +3 more | 2023-02-28 |
| 11581214 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Richard M. Blank, Benjamin W. Mooring | 2023-02-14 |