Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835927 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more | 2023-12-05 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Lin Zhang +4 more | 2023-09-26 |
| 11586160 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more | 2023-02-21 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Hanhong Chen +2 more | 2023-02-21 |