Issued Patents 2023
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852410 | Back-blowing unblocking device for dustproof screen of dryer, dustproof equipment, and dryer | Hongbing Wang, Guozhi LIU, Xin Wang | 2023-12-26 |
| 11851758 | Fabrication of a high temperature showerhead | Sumit Agarwal, Katherine Woo, Shawyon Jafari, Chidambara A. Ramalingam | 2023-12-26 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Satish Radhakrishnan, Rui Cheng, Diwakar Kedlaya +7 more | 2023-11-28 |
| 11808639 | High-precision temperature demodulation method oriented toward distributed fiber Raman sensor | Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Tao Wang, Yuncai Wang +3 more | 2023-11-07 |
| 11731321 | Method for preparing microgroove array surface with nearly cylindrical surface based on air molding method | Weifeng Jin, Xin Ju, Lamei Wang | 2023-08-22 |
| 11699602 | Substrate support assemblies and components | Edward P. Hammond, IV, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez | 2023-07-11 |
| 11655144 | Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method | Fanlin ZENG, Lamei Wang, Rao Fu, Gang Liu, Jie Luo | 2023-05-23 |
| 11594440 | Real time bias detection and correction for electrostatic chuck | Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno | 2023-02-28 |
| 11587817 | High temperature bipolar electrostatic chuck | Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez | 2023-02-21 |
| 11584994 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2023-02-21 |
| 11573322 | Laser speed measuring method, control device and laser velocimeter | Shangmin Sun, Yongming Wang, Yanwei Xu, Weifeng Yu, Yu-Hsiang Hu +1 more | 2023-02-07 |