Issued Patents 2023
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Rui Cheng | 2023-02-28 |
| 11578409 | Low deposition rates for flowable PECVD | Shishi Jiang, Pramit Manna | 2023-02-14 |
| 11560626 | Substrate processing chamber | Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Pramit Manna, Carlaton WONG +2 more | 2023-01-24 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Pramit Manna, Eswaranand Venkatasubramanian, Timothy Joseph Franklin, Edward Haywood +2 more | 2023-01-17 |
| 11557478 | In-situ high power implant to relieve stress of a thin film | Eswaranand Venkatasubramanian, Pramit Manna, Srinivas Gandikota | 2023-01-17 |
| 11550222 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Daniel Lee Diehl, Ho-yung David Hwang, Jothilingam Ramalingam | 2023-01-10 |
| 11545354 | Molecular layer deposition method and system | Bhaskar Jyoti Bhuyan, Zeqing Shen, Bo Qi, Xinke Wang, Mark Saly | 2023-01-03 |