Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr. +1 more | 2023-08-15 |
| 11692110 | Low oxide trench dishing chemical mechanical polishing | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2023-07-04 |
| 11667839 | Low oxide trench dishing chemical mechanical polishing | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2023-06-06 |
| 11643599 | Tungsten chemical mechanical polishing for reduced oxide erosion | Chun Lu, Xiaobo Shi, Dnyanesh Chandrakant Tamboli, Reinaldo Mario Machado, Matthias Stender | 2023-05-09 |
| 11626279 | Compositions and methods for making silicon containing films | Anupama Mallikarjunan, Andrew David Johnson, Meiliang Wang, Raymond Nicholas Vrtis, Bing Han +1 more | 2023-04-11 |
| 11608451 | Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with tunable silicon oxide and silicon nitride removal rates | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2023-03-21 |
| 11549034 | Oxide chemical mechanical planarization (CMP) polishing compositions | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2023-01-10 |