Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11643599 | Tungsten chemical mechanical polishing for reduced oxide erosion | Chun Lu, Xiaobo Shi, Dnyanesh Chandrakant Tamboli, Mark Leonard O'Neill, Matthias Stender | 2023-05-09 |