Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11643599 | Tungsten chemical mechanical polishing for reduced oxide erosion | Chun Lu, Xiaobo Shi, Reinaldo Mario Machado, Mark Leonard O'Neill, Matthias Stender | 2023-05-09 |
| 11560533 | Post chemical mechanical planarization (CMP) cleaning | — | 2023-01-24 |